Are diffractive MEMS devices reliable?

Silicon Light Machines’ diffractive MEMS are extremely reliable. The ribbons’ total range of motion is very small (~0.2 micrometers), and there are no points of contact between moving parts. In addition, the GLV device can remain stable over a long period of exposure to high power laser illumination. We have tested our MEMS devices for over a trillion cycles, and we could not measure any onset of fatigue.